Use this url to cite ETD: https://hdl.handle.net/20.500.14911/107432
Self-formation processes in technologies of integrated circuits
Publication Type (CRIS)
Habilitacinio darbo santrauka / Habbilitation Work Summary (ETD_HBL_S)
Publication Type (eLABa)
Habilitacinio darbo santrauka / Habilitation thesis abstract (ETD_HBL_S)
eLABa ID
14393778
Science / Art Area
Technologijos mokslai / Technological sciences (T)
Field of Science / Art
Elektros ir elektronikos inžinerija / Electrical and electronic engineering (T001)
Resource Type (COAR)
TextThesisDoctoral thesis
Title
Self-formation processes in technologies of integrated circuits
Extent
59 p.
Published In
2003
Publisher
Vilnius : Technika
Country
Lietuva / Lithuania (LT)
Language
Anglų / English (en)
Defended
Taip / Yes